Kajari-Schröder, Sarah; Käsewieter, Jörg; Hensen, Jan; Brendel, Rolf
(Amsterdam : Elsevier, 2013)
We discuss the lift-off of free-standing epitaxially grown silicon layers from the porous silicon (PSI) process, which is a kerfless wafering technology. The lift-off is a crucial step in the PSI cycle. A high-porosity ...